Issued Patents 2022
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527424 | Substrate transfer systems and methods of use thereof | Alex Berger, Eric A. Englhardt | 2022-12-13 |
| 11469123 | Mapping of a replacement parts storage container | Nicholas Michael Bergantz, Doug McAllister, Helder Lee | 2022-10-11 |
| 11456197 | Systems and methods for providing maintenance access to electronic device manufacturing tools | Michael R. Rice, Juan Carlos Rocha-Alvarez | 2022-09-27 |
| 11413767 | Sensor-based position and orientation feedback of robot end effector with respect to destination chamber | Preetham Kariyaiah Shivanna, Paul Z. Wirth | 2022-08-16 |
| 11370114 | Autoteach enclosure system | Nicholas Michael Kopec, Lyle Kosinski, Matvey Farber | 2022-06-28 |
| 11358809 | Vacuum robot apparatus for variable pitch access | Rajkumar Thanu, Karuppasamy Muthukamatchi | 2022-06-14 |
| 11353381 | Portable disc to measure chemical gas contaminants within semiconductor equipment and clean room | Devendra Channappa Holeyannavar, Dean C. Hruzek, Arunkumar Ramachandraiah, Shivaraj Manjunath Nara, Paul B. Reuter | 2022-06-07 |
| 11244846 | Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing | Michael R. Rice, Karuppasamy Muthukamatchi, Nir Merry | 2022-02-08 |
| 11232965 | Transport system | Jacob Newman, Ulrich Oldendorf, Martin Aenis, Andrew J. Constant, Shay Assaf +2 more | 2022-01-25 |