Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11380564 | Processing system having a front opening unified pod (FOUP) load lock | — | 2022-07-05 |
| 11232965 | Transport system | Ulrich Oldendorf, Martin Aenis, Andrew J. Constant, Shay Assaf, Jeffrey C. Hudgens +2 more | 2022-01-25 |