Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11540432 | Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools | Gayatri Natu, Prerna Goradia, Darshan Thakare, David Fenwick, Xiaoming He +6 more | 2022-12-27 |
| 11390947 | Method of forming a fluorinated metal film | Nitin Deepak, Suresh Chand Seth, Prerna Goradia, Darshan Thakare, Jennifer Y. Sun +1 more | 2022-07-19 |
| 11359282 | Methods for forming impurity free metal alloy films | Darshan Thakare, Prerna Goradia, Robert Jan Visser, Yixiong Yang, Jacqueline S. Wrench +1 more | 2022-06-14 |