Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11540432 | Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools | Gayatri Natu, Geetika Bajaj, Darshan Thakare, David Fenwick, Xiaoming He +6 more | 2022-12-27 |
| 11424134 | Atomic layer etching of metals | Nitin Deepak | 2022-08-23 |
| 11390947 | Method of forming a fluorinated metal film | Nitin Deepak, Suresh Chand Seth, Geetika Bajaj, Darshan Thakare, Jennifer Y. Sun +1 more | 2022-07-19 |
| 11388822 | Methods for improved polymer-copper adhesion | Tapash Chakraborty, Steven Verhaverbeke, Han-Wen Chen, Chintan Buch, Giback Park +1 more | 2022-07-12 |
| 11359282 | Methods for forming impurity free metal alloy films | Geetika Bajaj, Darshan Thakare, Robert Jan Visser, Yixiong Yang, Jacqueline S. Wrench +1 more | 2022-06-14 |
| 11280717 | Methods and apparatus for detection and analysis of nanoparticles from semiconductor chamber parts | Avishek Ghosh, Robert Jan Visser | 2022-03-22 |