Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11540432 | Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools | Gayatri Natu, Geetika Bajaj, Prerna Goradia, Darshan Thakare, Xiaoming He +6 more | 2022-12-27 | $54,393,000 |
| 11326253 | Atomic layer deposition of protective coatings for semiconductor process chamber components | Jennifer Y. Sun | 2022-05-10 | $45,778,000 |
| 11251023 | Multi-layer plasma resistant coating by atomic layer deposition | Xiaowei Wu, Jennifer Y. Sun, Guodong Zhan | 2022-02-15 | $65,265,000 |