Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11424134 | Atomic layer etching of metals | Prerna Goradia | 2022-08-23 |
| 11390947 | Method of forming a fluorinated metal film | Suresh Chand Seth, Prerna Goradia, Geetika Bajaj, Darshan Thakare, Jennifer Y. Sun +1 more | 2022-07-19 |