Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11540432 | Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools | Gayatri Natu, Geetika Bajaj, Prerna Goradia, Darshan Thakare, David Fenwick +6 more | 2022-12-27 |
| 11443973 | Robot for simultaneous substrate transfer | Jason M. Schaller, Luke Bonecutter, Charles T. Carlson, Rajkumar Thanu, Karuppasamy Muthukamatchi +1 more | 2022-09-13 |
| 11413744 | Multi-turn drive assembly and systems and methods of use thereof | Damon K. Cox, Rajkumar Thanu | 2022-08-16 |
| 11355367 | Robot for simultaneous substrate transfer | Jason M. Schaller, Charles T. Carlson, Luke Bonecutter, David Blahnik, Karuppasamy Muthukamatchi +1 more | 2022-06-07 |