Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11415463 | Contactless workpiece temperature sensor | — | 2022-08-16 |
| 11315806 | Batch heating and cooling chamber or loadlock | Jason M. Schaller, Robert Brent Vopat, Benjamin B. Riordon, David Blahnik, William T. Weaver | 2022-04-26 |
| 11264258 | Buffer chamber wafer heating mechanism and supporting robots | William T. Weaver, Jason M. Schaller, Robert Brent Vopat, David Blahnik, Benjamin B. Riordon | 2022-03-01 |