Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11315806 | Batch heating and cooling chamber or loadlock | Jason M. Schaller, Robert Brent Vopat, Paul E. Pergande, Benjamin B. Riordon, David Blahnik | 2022-04-26 |
| 11264258 | Buffer chamber wafer heating mechanism and supporting robots | Jason M. Schaller, Robert Brent Vopat, David Blahnik, Benjamin B. Riordon, Paul E. Pergande | 2022-03-01 |
| 11232965 | Transport system | Jacob Newman, Ulrich Oldendorf, Martin Aenis, Andrew J. Constant, Shay Assaf +2 more | 2022-01-25 |