Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11524392 | Minimal contact gripping of thin optical devices | Yaseer Arafath Ahamed, Kangkang Wang, James D. Strassner, Ludovic Godet | 2022-12-13 |
| 11443973 | Robot for simultaneous substrate transfer | Jason M. Schaller, Luke Bonecutter, Charles T. Carlson, Rajkumar Thanu, Karuppasamy Muthukamatchi +1 more | 2022-09-13 |
| 11355367 | Robot for simultaneous substrate transfer | Jason M. Schaller, Charles T. Carlson, Luke Bonecutter, David Blahnik, Karuppasamy Muthukamatchi +1 more | 2022-06-07 |
| 11315806 | Batch heating and cooling chamber or loadlock | Jason M. Schaller, Robert Brent Vopat, Paul E. Pergande, David Blahnik, William T. Weaver | 2022-04-26 |
| 11306824 | Dual port remote plasma clean isolation valve | Charles T. Carlson, Aaron P. Webb, Gary Wyka | 2022-04-19 |
| 11264258 | Buffer chamber wafer heating mechanism and supporting robots | William T. Weaver, Jason M. Schaller, Robert Brent Vopat, David Blahnik, Paul E. Pergande | 2022-03-01 |