| 11532462 |
Method and system for cleaning a process chamber |
Kalyanjit Ghosh, Shailendra Srivastava, Tejas Ulavi, Yusheng Zhou, Sanjeev Baluja |
2022-12-20 |
| 11530482 |
Faceplate having a curved surface |
Shailendra Srivastava, Sai Susmita Addepalli, Nikhil Sudhindrarao Jorapur, Daemian Raj Benjamin Raj, Juan Carlos Rocha-Alvarez +5 more |
2022-12-20 |
| 11492705 |
Isolator apparatus and methods for substrate processing chambers |
Nitin Pathak, Tuan Nguyen, Thomas Rubio, Badri Narayan Ramamurthi, Juan Carlos Rocha-Alvarez |
2022-11-08 |
| 11443921 |
Radio frequency ground system and method |
Gaosheng Fu, Tuan Nguyen |
2022-09-13 |
| 11434569 |
Ground path systems for providing a shorter and symmetrical ground path |
Tuan Nguyen, Jason M. Schaller, Edward P. Hammond, IV, David Blahnik, Tejas Ulavi +3 more |
2022-09-06 |
| 11359657 |
Fitting for attachment to a part and associated assembly and method |
— |
2022-06-14 |
| 11299805 |
Plasma corrision resistive heater for high temperature processing |
Abdul Aziz Khaja, Ren-Guan Duan, Jianhua Zhou, Juan Carlos Rocha-Alvarez |
2022-04-12 |
| 11293099 |
Showerhead assembly with multiple fluid delivery zones |
Juan Carlos Rocha-Alvarez, Sanjeev Baluja, Sam Kim, Tuan Nguyen |
2022-04-05 |
| 11276569 |
On stack overlay improvement for 3D NAND |
Yongjing Lin, Tza-Jing Gung, Masaki Ogata, Yusheng Zhou, Xinhai Han +3 more |
2022-03-15 |
| 11242600 |
High temperature face plate for deposition application |
Saket Rathi, Tuan Nguyen |
2022-02-08 |
| 11225992 |
Fastening system and methods for use |
Chanseyha Eng |
2022-01-18 |
