Issued Patents 2022
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532462 | Method and system for cleaning a process chamber | Kalyanjit Ghosh, Shailendra Srivastava, Tejas Ulavi, Yusheng Zhou, Sanjeev Baluja | 2022-12-20 |
| 11530482 | Faceplate having a curved surface | Shailendra Srivastava, Sai Susmita Addepalli, Nikhil Sudhindrarao Jorapur, Daemian Raj Benjamin Raj, Juan Carlos Rocha-Alvarez +5 more | 2022-12-20 |
| 11492705 | Isolator apparatus and methods for substrate processing chambers | Nitin Pathak, Tuan Nguyen, Thomas Rubio, Badri Narayan Ramamurthi, Juan Carlos Rocha-Alvarez | 2022-11-08 |
| 11443921 | Radio frequency ground system and method | Gaosheng Fu, Tuan Nguyen | 2022-09-13 |
| 11434569 | Ground path systems for providing a shorter and symmetrical ground path | Tuan Nguyen, Jason M. Schaller, Edward P. Hammond, IV, David Blahnik, Tejas Ulavi +3 more | 2022-09-06 |
| 11359657 | Fitting for attachment to a part and associated assembly and method | — | 2022-06-14 |
| 11299805 | Plasma corrision resistive heater for high temperature processing | Abdul Aziz Khaja, Ren-Guan Duan, Jianhua Zhou, Juan Carlos Rocha-Alvarez | 2022-04-12 |
| 11293099 | Showerhead assembly with multiple fluid delivery zones | Juan Carlos Rocha-Alvarez, Sanjeev Baluja, Sam Kim, Tuan Nguyen | 2022-04-05 |
| 11276569 | On stack overlay improvement for 3D NAND | Yongjing Lin, Tza-Jing Gung, Masaki Ogata, Yusheng Zhou, Xinhai Han +3 more | 2022-03-15 |
| 11242600 | High temperature face plate for deposition application | Saket Rathi, Tuan Nguyen | 2022-02-08 |
| 11225992 | Fastening system and methods for use | Chanseyha Eng | 2022-01-18 |