Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532462 | Method and system for cleaning a process chamber | Kalyanjit Ghosh, Shailendra Srivastava, Tejas Ulavi, Amit Kumar BANSAL, Sanjeev Baluja | 2022-12-20 |
| 11276569 | On stack overlay improvement for 3D NAND | Yongjing Lin, Tza-Jing Gung, Masaki Ogata, Xinhai Han, Deenesh Padhi +3 more | 2022-03-15 |