Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11479855 | Spatial wafer processing with improved temperature uniformity | Joseph AuBuchon, Sanjeev Baluja, Jared Ahmad Lee, Tejas Ulavi, Michael R. Rice | 2022-10-25 |
| 11430686 | Pedestal heater for spatial multi-wafer processing tool | Tejas Ulavi, Sanjeev Baluja | 2022-08-30 |