Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11479855 | Spatial wafer processing with improved temperature uniformity | Joseph AuBuchon, Sanjeev Baluja, Dhritiman Subha Kashyap, Tejas Ulavi, Michael R. Rice | 2022-10-25 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11479855 | Spatial wafer processing with improved temperature uniformity | Joseph AuBuchon, Sanjeev Baluja, Dhritiman Subha Kashyap, Tejas Ulavi, Michael R. Rice | 2022-10-25 |