Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11260432 | In-situ DC plasma for cleaning pedestal heater | Tejas Ulavi, Sanjeev Baluja, Wei V. Tang | 2022-03-01 |
| 11220747 | Complementary pattern station designs | Joseph AuBuchon, Sanjeev Baluja, Michael R. Rice, Hanhong Chen | 2022-01-11 |