Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11315769 | Plasma source for rotating susceptor | Kallol Bera, Anantha K. Subramani, John C. Forster, Philip Allan Kraus, Farzad Houshmand | 2022-04-26 |
| 11220747 | Complementary pattern station designs | Joseph AuBuchon, Sanjeev Baluja, Michael R. Rice, Arkaprava Dan | 2022-01-11 |