Issued Patents 2022
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508558 | Thermal repeatability and in-situ showerhead temperature monitoring | Timothy Joseph Franklin, Steven E. Babayan | 2022-11-22 |
| 11501955 | Modular high-frequency source with integrated gas distribution | Hanh Nguyen, Thai Cheng Chua | 2022-11-15 |
| 11488796 | Thermal break for high-frequency antennae | Thai Cheng Chua, Hanh Nguyen | 2022-11-01 |
| 11404248 | Modular microwave plasma source | Thai Cheng Chua | 2022-08-02 |
| 11393661 | Remote modular high-frequency source | Hanh Nguyen, Thai Cheng Chua | 2022-07-19 |
| 11368003 | Seamless electrical conduit | Anantha K. Subramani | 2022-06-21 |
| 11325827 | Pore formation in a substrate | Joseph R. Johnson | 2022-05-10 |
| 11315769 | Plasma source for rotating susceptor | Kallol Bera, Anantha K. Subramani, John C. Forster, Farzad Houshmand, Hanhong Chen | 2022-04-26 |
| 11289312 | Physical vapor deposition (PVD) chamber with in situ chamber cleaning capability | Adolph Miller Allen, Vanessa Faune, Zhong Qiang Hua, Kirankumar Neelasandra SAVANDAIAH, Anantha K. Subramani +5 more | 2022-03-29 |
| 11284018 | Smart camera substrate | Upendra Ummethala, Keith R. Berding, Blake Erickson, Patrick Tae, Devendra Channappa Holeyannavar +4 more | 2022-03-22 |
| 11257698 | Selective etch rate monitor | Timothy Joseph Franklin | 2022-02-22 |
| 11244791 | Rechargeable power source for mobile devices which includes an ultracapacitor | Cattien V. Nguyen, You Li, Darrell L. Niemann, Hoang Nguyen Ly | 2022-02-08 |
| 11217443 | Sequential deposition and high frequency plasma treatment of deposited film on patterned and un-patterned substrates | Vinayak Veer Vats, Hang Yu, Sanjay Kamath, William J. Durand, Lakmal C. Kalutarage +6 more | 2022-01-04 |