Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508558 | Thermal repeatability and in-situ showerhead temperature monitoring | Timothy Joseph Franklin, Philip Allan Kraus | 2022-11-22 |
| 11437261 | Cryogenic electrostatic chuck | Yogananda Sarode Vishwanath, Stephen Prouty, Alvaro Garcia de Gorordo, Andreas Schmid, Andrew Antoine NOUJAIM | 2022-09-06 |
| 11393710 | Wafer edge ring lifting solution | Michael R. Rice, Yogananda Sarode Vishwanath, Sunil Srinivasan, Rajinder Dhindsa, Olivier Luere +2 more | 2022-07-19 |
| 11373893 | Cryogenic electrostatic chuck | Yogananda Sarode Vishwanath, Stephen Prouty, Alvaro Garcia de Gorordo, Andreas Schmid, Andrew Antoine NOUJAIM | 2022-06-28 |