Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11437261 | Cryogenic electrostatic chuck | Steven E. Babayan, Stephen Prouty, Alvaro Garcia de Gorordo, Andreas Schmid, Andrew Antoine NOUJAIM | 2022-09-06 |
| 11393710 | Wafer edge ring lifting solution | Michael R. Rice, Sunil Srinivasan, Rajinder Dhindsa, Steven E. Babayan, Olivier Luere +2 more | 2022-07-19 |
| 11373893 | Cryogenic electrostatic chuck | Steven E. Babayan, Stephen Prouty, Alvaro Garcia de Gorordo, Andreas Schmid, Andrew Antoine NOUJAIM | 2022-06-28 |