Issued Patents 2022
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521838 | Integrated cleaning process for substrate etching | Yi Zhou, Seul Ki Ahn, Seung-Young Son, Li-Te Chang, Sunil Srinivasan | 2022-12-06 |
| 11521849 | In-situ deposition process | Sang Wook Park, Sunil Srinivasan, Jonathan Kim, Lin YU, Zhonghua Yao +1 more | 2022-12-06 |
| 11508554 | High voltage filter assembly | Anurag Kumar Mishra, James Rogers, Leonid Dorf, Olivier Luere | 2022-11-22 |
| 11495470 | Method of enhancing etching selectivity using a pulsed plasma | Hailong Zhou, Sean S. Kang, Kenji Takeshita, Taehwan Lee, Iljo Kwak | 2022-11-08 |
| 11482402 | Methods and apparatus for processing a substrate | Leonid Dorf, Olivier Luere, Evgeny Kamenetskiy | 2022-10-25 |
| 11462389 | Pulsed-voltage hardware assembly for use in a plasma processing system | Leonid Dorf, James Rogers, Daniel Sang Byun, Evgeny Kamenetskiy, Yue Guo +5 more | 2022-10-04 |
| 11462388 | Plasma processing assembly using pulsed-voltage and radio-frequency power | Leonid Dorf, James Rogers, Daniel Sang Byun, Evgeny Kamenetskiy, Yue Guo +4 more | 2022-10-04 |
| 11393710 | Wafer edge ring lifting solution | Michael R. Rice, Yogananda Sarode Vishwanath, Sunil Srinivasan, Steven E. Babayan, Olivier Luere +2 more | 2022-07-19 |
| 11342166 | Confinement ring for use in a plasma processing system | Akira Koshiishi, Alexei Marakhatanov | 2022-05-24 |
| 11284500 | Method of controlling ion energy distribution using a pulse generator | Leonid Dorf, Olivier Luere, James Rogers, Sunil Srinivasan, Anurag Kumar Mishra | 2022-03-22 |
| 11232933 | Temperature and bias control of edge ring | James Rogers, Linying Cui | 2022-01-25 |