| 11521828 |
Inductively coupled plasma source |
John Poulose |
2022-12-06 |
| 11508554 |
High voltage filter assembly |
Anurag Kumar Mishra, Leonid Dorf, Rajinder Dhindsa, Olivier Luere |
2022-11-22 |
| 11476145 |
Automatic ESC bias compensation when using pulsed DC bias |
Linying Cui, Leonid Dorf |
2022-10-18 |
| 11462388 |
Plasma processing assembly using pulsed-voltage and radio-frequency power |
Leonid Dorf, Rajinder Dhindsa, Daniel Sang Byun, Evgeny Kamenetskiy, Yue Guo +4 more |
2022-10-04 |
| 11462389 |
Pulsed-voltage hardware assembly for use in a plasma processing system |
Leonid Dorf, Rajinder Dhindsa, Daniel Sang Byun, Evgeny Kamenetskiy, Yue Guo +5 more |
2022-10-04 |
| 11406062 |
Agricultural harvester with a feeder house having a locking axle assembly |
Steven John Schrag, Rex Schertz |
2022-08-09 |
| 11367593 |
Apparatus and methods for manipulating radio frequency power at an edge ring in plasma process device |
Linying Cui |
2022-06-21 |
| 11289310 |
Circuits for edge ring control in shaped DC pulsed plasma process device |
Linying Cui |
2022-03-29 |
| 11284500 |
Method of controlling ion energy distribution using a pulse generator |
Leonid Dorf, Olivier Luere, Rajinder Dhindsa, Sunil Srinivasan, Anurag Kumar Mishra |
2022-03-22 |
| 11276601 |
Apparatus and methods for manipulating power at an edge ring in a plasma processing device |
Linying Cui |
2022-03-15 |
| 11232933 |
Temperature and bias control of edge ring |
Linying Cui, Rajinder Dhindsa |
2022-01-25 |
