Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538663 | Methods and apparatus for processing a substrate | Kartik Ramaswamy | 2022-12-27 |
| 11521828 | Inductively coupled plasma source | James Rogers | 2022-12-06 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538663 | Methods and apparatus for processing a substrate | Kartik Ramaswamy | 2022-12-27 |
| 11521828 | Inductively coupled plasma source | James Rogers | 2022-12-06 |