Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521838 | Integrated cleaning process for substrate etching | Yi Zhou, Seul Ki Ahn, Seung-Young Son, Li-Te Chang, Rajinder Dhindsa | 2022-12-06 |
| 11521849 | In-situ deposition process | Sang Wook Park, Rajinder Dhindsa, Jonathan Kim, Lin YU, Zhonghua Yao +1 more | 2022-12-06 |
| 11515166 | Cryogenic atomic layer etch with noble gases | Alvaro Garcia de Gorordo, Zhonghua Yao, Sang Wook Park | 2022-11-29 |
| 11393710 | Wafer edge ring lifting solution | Michael R. Rice, Yogananda Sarode Vishwanath, Rajinder Dhindsa, Steven E. Babayan, Olivier Luere +2 more | 2022-07-19 |
| 11284500 | Method of controlling ion energy distribution using a pulse generator | Leonid Dorf, Olivier Luere, Rajinder Dhindsa, James Rogers, Anurag Kumar Mishra | 2022-03-22 |