Issued Patents 2022
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521849 | In-situ deposition process | Sang Wook Park, Sunil Srinivasan, Rajinder Dhindsa, Jonathan Kim, Lin YU +1 more | 2022-12-06 |
| 11508554 | High voltage filter assembly | Anurag Kumar Mishra, James Rogers, Leonid Dorf, Rajinder Dhindsa | 2022-11-22 |
| 11482402 | Methods and apparatus for processing a substrate | Leonid Dorf, Rajinder Dhindsa, Evgeny Kamenetskiy | 2022-10-25 |
| 11462389 | Pulsed-voltage hardware assembly for use in a plasma processing system | Leonid Dorf, Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Evgeny Kamenetskiy +5 more | 2022-10-04 |
| 11462388 | Plasma processing assembly using pulsed-voltage and radio-frequency power | Leonid Dorf, Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Evgeny Kamenetskiy +4 more | 2022-10-04 |
| 11393710 | Wafer edge ring lifting solution | Michael R. Rice, Yogananda Sarode Vishwanath, Sunil Srinivasan, Rajinder Dhindsa, Steven E. Babayan +2 more | 2022-07-19 |
| 11284500 | Method of controlling ion energy distribution using a pulse generator | Leonid Dorf, Rajinder Dhindsa, James Rogers, Sunil Srinivasan, Anurag Kumar Mishra | 2022-03-22 |