Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482402 | Methods and apparatus for processing a substrate | Leonid Dorf, Rajinder Dhindsa, Olivier Luere | 2022-10-25 |
| 11462388 | Plasma processing assembly using pulsed-voltage and radio-frequency power | Leonid Dorf, Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Yue Guo +4 more | 2022-10-04 |
| 11462389 | Pulsed-voltage hardware assembly for use in a plasma processing system | Leonid Dorf, Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Yue Guo +5 more | 2022-10-04 |