Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515166 | Cryogenic atomic layer etch with noble gases | Zhonghua Yao, Sunil Srinivasan, Sang Wook Park | 2022-11-29 |
| 11437261 | Cryogenic electrostatic chuck | Yogananda Sarode Vishwanath, Steven E. Babayan, Stephen Prouty, Andreas Schmid, Andrew Antoine NOUJAIM | 2022-09-06 |