Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11437261 | Cryogenic electrostatic chuck | Yogananda Sarode Vishwanath, Steven E. Babayan, Stephen Prouty, Alvaro Garcia de Gorordo, Andreas Schmid | 2022-09-06 |
| 11373893 | Cryogenic electrostatic chuck | Yogananda Sarode Vishwanath, Steven E. Babayan, Stephen Prouty, Alvaro Garcia de Gorordo, Andreas Schmid | 2022-06-28 |