Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11456161 | Substrate support pedestal | Steven Joseph LAROSA | 2022-09-27 |
| 11437261 | Cryogenic electrostatic chuck | Yogananda Sarode Vishwanath, Steven E. Babayan, Alvaro Garcia de Gorordo, Andreas Schmid, Andrew Antoine NOUJAIM | 2022-09-06 |
| 11380572 | Substrate support carrier with improved bond layer protection | Andreas Schmid, Jonathan Simmons, Sumanth Banda | 2022-07-05 |
| 11373893 | Cryogenic electrostatic chuck | Yogananda Sarode Vishwanath, Steven E. Babayan, Alvaro Garcia de Gorordo, Andreas Schmid, Andrew Antoine NOUJAIM | 2022-06-28 |