Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11373893 | Cryogenic electrostatic chuck | Yogananda Sarode Vishwanath, Steven E. Babayan, Stephen Prouty, Andreas Schmid, Andrew Antoine NOUJAIM | 2022-06-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11373893 | Cryogenic electrostatic chuck | Yogananda Sarode Vishwanath, Steven E. Babayan, Stephen Prouty, Andreas Schmid, Andrew Antoine NOUJAIM | 2022-06-28 |