Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521838 | Integrated cleaning process for substrate etching | Yi Zhou, Seung-Young Son, Li-Te Chang, Sunil Srinivasan, Rajinder Dhindsa | 2022-12-06 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521838 | Integrated cleaning process for substrate etching | Yi Zhou, Seung-Young Son, Li-Te Chang, Sunil Srinivasan, Rajinder Dhindsa | 2022-12-06 |