Issued Patents 2022
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476145 | Automatic ESC bias compensation when using pulsed DC bias | James Rogers, Leonid Dorf | 2022-10-18 |
| 11462388 | Plasma processing assembly using pulsed-voltage and radio-frequency power | Leonid Dorf, Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Evgeny Kamenetskiy +4 more | 2022-10-04 |
| 11462389 | Pulsed-voltage hardware assembly for use in a plasma processing system | Leonid Dorf, Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Evgeny Kamenetskiy +5 more | 2022-10-04 |
| 11367593 | Apparatus and methods for manipulating radio frequency power at an edge ring in plasma process device | James Rogers | 2022-06-21 |
| 11289310 | Circuits for edge ring control in shaped DC pulsed plasma process device | James Rogers | 2022-03-29 |
| 11276601 | Apparatus and methods for manipulating power at an edge ring in a plasma processing device | James Rogers | 2022-03-15 |
| 11232933 | Temperature and bias control of edge ring | James Rogers, Rajinder Dhindsa | 2022-01-25 |