| 11476145 |
Automatic ESC bias compensation when using pulsed DC bias |
James Rogers, Leonid Dorf |
2022-10-18 |
| 11462388 |
Plasma processing assembly using pulsed-voltage and radio-frequency power |
Leonid Dorf, Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Evgeny Kamenetskiy +4 more |
2022-10-04 |
| 11462389 |
Pulsed-voltage hardware assembly for use in a plasma processing system |
Leonid Dorf, Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Evgeny Kamenetskiy +5 more |
2022-10-04 |
| 11367593 |
Apparatus and methods for manipulating radio frequency power at an edge ring in plasma process device |
James Rogers |
2022-06-21 |
| 11289310 |
Circuits for edge ring control in shaped DC pulsed plasma process device |
James Rogers |
2022-03-29 |
| 11276601 |
Apparatus and methods for manipulating power at an edge ring in a plasma processing device |
James Rogers |
2022-03-15 |
| 11232933 |
Temperature and bias control of edge ring |
James Rogers, Rajinder Dhindsa |
2022-01-25 |
