Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11348760 | Plasma processing apparatus and method of manufacturing semiconductor device using the same | Masato Horiguchi, YongWoo Lee, Kyohyeok Kim, Dowon Kim, Yunhwan Kim +3 more | 2022-05-31 |
| 11342166 | Confinement ring for use in a plasma processing system | Rajinder Dhindsa, Alexei Marakhatanov | 2022-05-24 |