Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515193 | Etching apparatus | Kuihyun Yoon, Jaehak Lee, Yunhwan Kim, Jongkeun Lee, Jewoo Han | 2022-11-29 |
| 11348760 | Plasma processing apparatus and method of manufacturing semiconductor device using the same | Akira Koshiishi, Masato Horiguchi, YongWoo Lee, Dowon Kim, Yunhwan Kim +3 more | 2022-05-31 |