Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515193 | Etching apparatus | Kuihyun Yoon, Jaehak Lee, Yunhwan Kim, Jongkeun Lee, Kyohyeok Kim | 2022-11-29 |
| 11450545 | Capacitively-coupled plasma substrate processing apparatus including a focus ring and a substrate processing method using the same | Jongwoo Sun, Incheol Song, Hongmin Yoon, Jihyun Lim, Masayuki Tomoyasu | 2022-09-20 |
| 11251022 | Gas supply assembly and substrate processing apparatus including the same | Kangmin Jeon, Dougyong Sung, Jongwoo Sun, Minkyu SUNG, Kimoon Jung +2 more | 2022-02-15 |