Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11450545 | Capacitively-coupled plasma substrate processing apparatus including a focus ring and a substrate processing method using the same | Incheol Song, Hongmin Yoon, Jihyun Lim, Masayuki Tomoyasu, Jewoo Han | 2022-09-20 |
| 11430679 | Semiconductor manufacturing apparatus | Kwangnam Kim, Nohsung Kwak, Sungyeon KIM, Hyungjun Kim, Haejoong Park +3 more | 2022-08-30 |
| 11348760 | Plasma processing apparatus and method of manufacturing semiconductor device using the same | Akira Koshiishi, Masato Horiguchi, YongWoo Lee, Kyohyeok Kim, Dowon Kim +3 more | 2022-05-31 |
| 11264291 | Sensor device and etching apparatus having the same | Seeyub Yang, Jeongil Mun, Hyungjoo Lee, Kyoungsuk Kim, Kyeonghun Kim | 2022-03-01 |
| 11251022 | Gas supply assembly and substrate processing apparatus including the same | Kangmin Jeon, Dougyong Sung, Minkyu SUNG, Kimoon Jung, Seongha JEONG +2 more | 2022-02-15 |
| 11215506 | Substrate processing apparatus, substrate processing module, and semiconductor device fabrication method | Kyeonghun Kim, Jeongil Mun, Hyung Joo Lee | 2022-01-04 |