Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11384433 | Gas injection module, substrate processing apparatus, and method of fabricating semiconductor device using the same | Minkyu SUNG, Sung-Ki Lee, Dougyong Sung, Sang Ho Lee | 2022-07-12 |
| 11251022 | Gas supply assembly and substrate processing apparatus including the same | Dougyong Sung, Jongwoo Sun, Minkyu SUNG, Kimoon Jung, Seongha JEONG +2 more | 2022-02-15 |