Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515902 | Method and apparatus for phase error compensation having tolerance to cyclic slip | Sang Rok MOON, Eon-sang KIM, Won Kyoung Lee, Seung Hyun CHO | 2022-11-29 |
| 11384433 | Gas injection module, substrate processing apparatus, and method of fabricating semiconductor device using the same | Sung-Ki Lee, Dougyong Sung, Sang Ho Lee, Kangmin Jeon | 2022-07-12 |
| 11251022 | Gas supply assembly and substrate processing apparatus including the same | Kangmin Jeon, Dougyong Sung, Jongwoo Sun, Kimoon Jung, Seongha JEONG +2 more | 2022-02-15 |