Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11384433 | Gas injection module, substrate processing apparatus, and method of fabricating semiconductor device using the same | Minkyu SUNG, Dougyong Sung, Sang Ho Lee, Kangmin Jeon | 2022-07-12 |