Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11384433 | Gas injection module, substrate processing apparatus, and method of fabricating semiconductor device using the same | Minkyu SUNG, Sung-Ki Lee, Sang Ho Lee, Kangmin Jeon | 2022-07-12 |
| 11282679 | Plasma control apparatus and plasma processing system including the same | Donghyeon Na, Hyosin KIM, Seungbo Shim, Hadong JIN, Minyoung Hur | 2022-03-22 |
| 11251022 | Gas supply assembly and substrate processing apparatus including the same | Kangmin Jeon, Jongwoo Sun, Minkyu SUNG, Kimoon Jung, Seongha JEONG +2 more | 2022-02-15 |