Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11282679 | Plasma control apparatus and plasma processing system including the same | Donghyeon Na, Hyosin KIM, Seungbo Shim, Dougyong Sung, Minyoung Hur | 2022-03-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11282679 | Plasma control apparatus and plasma processing system including the same | Donghyeon Na, Hyosin KIM, Seungbo Shim, Dougyong Sung, Minyoung Hur | 2022-03-22 |