Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11367597 | Electrostatic chuck and plasma processing apparatus including the same | YongWoo Lee, Youngjin Noh, Dowon Kim, Seungbo Shim | 2022-06-21 |
| 11282679 | Plasma control apparatus and plasma processing system including the same | Hyosin KIM, Seungbo Shim, Hadong JIN, Dougyong Sung, Minyoung Hur | 2022-03-22 |