Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11398397 | Electrostatic chuck and plasma processing apparatus including the same | YongWoo Lee, Myungsun Choi, Minyoung Hur, Seungbo Shim, Jaehak Lee | 2022-07-26 |
| 11367597 | Electrostatic chuck and plasma processing apparatus including the same | YongWoo Lee, Dowon Kim, Donghyeon Na, Seungbo Shim | 2022-06-21 |
| 11348760 | Plasma processing apparatus and method of manufacturing semiconductor device using the same | Akira Koshiishi, Masato Horiguchi, YongWoo Lee, Kyohyeok Kim, Dowon Kim +3 more | 2022-05-31 |