Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11398397 | Electrostatic chuck and plasma processing apparatus including the same | YongWoo Lee, Youngjin Noh, Minyoung Hur, Seungbo Shim, Jaehak Lee | 2022-07-26 |
MC
Myungsun Choi
Overall (2022): #322,127 of 548,613Top 60%
1
Patents 2022