Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11450545 | Capacitively-coupled plasma substrate processing apparatus including a focus ring and a substrate processing method using the same | Jongwoo Sun, Hongmin Yoon, Jihyun Lim, Masayuki Tomoyasu, Jewoo Han | 2022-09-20 |