Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11264291 | Sensor device and etching apparatus having the same | Jeongil Mun, Hyungjoo Lee, Kyoungsuk Kim, Kyeonghun Kim, Jongwoo Sun | 2022-03-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11264291 | Sensor device and etching apparatus having the same | Jeongil Mun, Hyungjoo Lee, Kyoungsuk Kim, Kyeonghun Kim, Jongwoo Sun | 2022-03-01 |