Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11397380 | Critical dimension measurement system and method of measuring critical dimensions using same | Won Joo Park, Seuk Hwan Choi, Dong-Seok Nam, Yoon Taek Han | 2022-07-26 |
| 11215506 | Substrate processing apparatus, substrate processing module, and semiconductor device fabrication method | Kyeonghun Kim, Jeongil Mun, Jongwoo Sun | 2022-01-04 |
| 11217875 | Electronic device comprising antenna | Dong-Yeon Kim, Jun Hwa OH, Soon-Ho Hwang, Sung Hyup Lee, Yoon Jae Lee | 2022-01-04 |