Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508558 | Thermal repeatability and in-situ showerhead temperature monitoring | Steven E. Babayan, Philip Allan Kraus | 2022-11-22 |
| 11270905 | Modulating film properties by optimizing plasma coupling materials | Eswaranand Venkatasubramanian, Edward Haywood, Samuel E. Gottheim, Pramit Manna, Kien N. Chuc +2 more | 2022-03-08 |
| 11257698 | Selective etch rate monitor | Philip Allan Kraus | 2022-02-22 |