Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11512391 | Process kit for a high throughput processing chamber | Kalyanjit Ghosh, Mayur Govind Kulkarni, Sanjeev Baluja, Sungjin Kim, Yanjie Wang | 2022-11-29 |
| D946534 | Radio frequency conduit | Adam J. Fischbach, Canfeng Lai, Carlaton WONG | 2022-03-22 |
| 11270905 | Modulating film properties by optimizing plasma coupling materials | Eswaranand Venkatasubramanian, Edward Haywood, Samuel E. Gottheim, Pramit Manna, Adam J. Fischbach +2 more | 2022-03-08 |
| 11264213 | Chemical control features in wafer process equipment | Qiwei Liang, Xinglong Chen, Dmitry Lubomirsky, Soonam Park, Jang-Gyoo Yang +4 more | 2022-03-01 |