Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11289312 | Physical vapor deposition (PVD) chamber with in situ chamber cleaning capability | Adolph Miller Allen, Vanessa Faune, Kirankumar Neelasandra SAVANDAIAH, Anantha K. Subramani, Philip Allan Kraus +5 more | 2022-03-29 |