Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538677 | Systems and methods for depositing high density and high tensile stress films | Chuanxi Yang, Yu-Chi Yang, Chuan Ying Wang, Allison Yau, Xinhai Han +2 more | 2022-12-27 |
| 11515145 | Deposition of silicon boron nitride films | Chuanxi Yang, Deenesh Padhi | 2022-11-29 |
| 11276570 | Multi-layer deposition and treatment of silicon nitride films | Vinayak Veer Vats, Byung Kook Ahn, Seoyoung LEE | 2022-03-15 |
| 11217443 | Sequential deposition and high frequency plasma treatment of deposited film on patterned and un-patterned substrates | Vinayak Veer Vats, Philip Allan Kraus, Sanjay Kamath, William J. Durand, Lakmal C. Kalutarage +6 more | 2022-01-04 |